A 3D micromixer fabricated with dry film resist

Adarsh D. Radadia; Li Cao; Hae Kwon Jeong; Mark A. Shannon; Richard I. Masel

doi:10.1109/memsys.2007.4433110

A 3D micromixer fabricated with dry film resist

Adarsh D. Radadia
, Li Cao
, Hae Kwon Jeong
, Mark A. Shannon
, Richard I. Masel

University of Illinois Urbana-Champaign
University of Illinois

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	361-364
Number of pages	4
ISBN (Print)	1424409519, 9781424409518
DOIs	https://doi.org/10.1109/memsys.2007.4433110
State	Published - 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: Jan 21 2007 → Jan 25 2007

Publication series

Series	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN	1084-6999

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	1/21/07 → 1/25/07

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/memsys.2007.4433110

Cite this

Radadia, A. D., Cao, L., Jeong, H. K., Shannon, M. A., & Masel, R. I. (2007). A 3D micromixer fabricated with dry film resist. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 361-364). Article 4433110 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/memsys.2007.4433110

A 3D micromixer fabricated with dry film resist. / Radadia, Adarsh D.; Cao, Li; Jeong, Hae Kwon et al.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc., 2007. p. 361-364 4433110 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Radadia, AD, Cao, L, Jeong, HK, Shannon, MA & Masel, RI 2007, A 3D micromixer fabricated with dry film resist. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433110, Institute of Electrical and Electronics Engineers Inc., Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 361-364, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 1/21/07. https://doi.org/10.1109/memsys.2007.4433110

Radadia AD, Cao L, Jeong HK, Shannon MA, Masel RI. A 3D micromixer fabricated with dry film resist. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc. 2007. p. 361-364. 4433110. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/memsys.2007.4433110

Radadia, Adarsh D. ; Cao, Li ; Jeong, Hae Kwon et al. / A 3D micromixer fabricated with dry film resist. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. Institute of Electrical and Electronics Engineers Inc., 2007. pp. 361-364 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{6cb22a198d1c40198b619f6eb9d05921,

title = "A 3D micromixer fabricated with dry film resist",

author = "Radadia, \{Adarsh D.\} and Li Cao and Jeong, \{Hae Kwon\} and Shannon, \{Mark A.\} and Masel, \{Richard I.\}",

year = "2007",

doi = "10.1109/memsys.2007.4433110",

language = "English",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "361--364",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

TY - GEN

T1 - A 3D micromixer fabricated with dry film resist

AU - Radadia, Adarsh D.

AU - Cao, Li

AU - Jeong, Hae Kwon

AU - Shannon, Mark A.

AU - Masel, Richard I.

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/52249094393

UR - https://www.scopus.com/pages/publications/52249094393#tab=citedBy

U2 - 10.1109/memsys.2007.4433110

DO - 10.1109/memsys.2007.4433110

M3 - Conference contribution

AN - SCOPUS:52249094393

SN - 1424409519

SN - 9781424409518

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 361

EP - 364

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

A 3D micromixer fabricated with dry film resist

Publication series

Conference

ASJC Scopus Subject Areas

Access to Document

Other files and links

Fingerprint

Cite this