A DOMAIN DECOMPOSITION ALGORITHM FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY

Weizhong Dai; Raja Nassar

doi:10.1115/IMECE1998-0991

A DOMAIN DECOMPOSITION ALGORITHM FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY

Weizhong Dai
, Raja Nassar

Mathematics and Statistics

Louisiana Tech University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Fluids Engineering
Publisher	American Society of Mechanical Engineers (ASME)
Pages	95-100
Number of pages	6
ISBN (Electronic)	9780791816059
DOIs	https://doi.org/10.1115/IMECE1998-0991
State	Published - 1998
Event	ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 - Anaheim, United States Duration: Nov 15 1998 → Nov 20 1998

Publication series

Series	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1998-L

Conference

Conference	ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Country/Territory	United States
City	Anaheim
Period	11/15/98 → 11/20/98

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

ASJC Scopus Subject Areas

Mechanical Engineering

Access to Document

10.1115/IMECE1998-0991

Cite this

A DOMAIN DECOMPOSITION ALGORITHM FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY. / Dai, Weizhong; Nassar, Raja.
Fluids Engineering. American Society of Mechanical Engineers (ASME), 1998. p. 95-100 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), Vol. 1998-L).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Dai, W & Nassar, R 1998, A DOMAIN DECOMPOSITION ALGORITHM FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY. in Fluids Engineering. American Society of Mechanical Engineers (ASME), ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1998-L, pp. 95-100, ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998, Anaheim, United States, 11/15/98. https://doi.org/10.1115/IMECE1998-0991

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author = "Weizhong Dai and Raja Nassar",

note = "Publisher Copyright: {\textcopyright} 1998 American Society of Mechanical Engineers (ASME). All rights reserved.; ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 ; Conference date: 15-11-1998 Through 20-11-1998",

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doi = "10.1115/IMECE1998-0991",

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A DOMAIN DECOMPOSITION ALGORITHM FOR THERMAL ANALYSIS IN X-RAY LITHOGRAPHY WITH CYLINDRICAL GEOMETRY

Publication series

Conference

UN SDGs

ASJC Scopus Subject Areas

Access to Document

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