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Conductive polycrystalline diamond probes for local anodic oxidation lithography

  • Institute for Micromanufacturing

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number465201
JournalNanotechnology
Volume26
Issue number46
DOIs
StatePublished - Oct 26 2015
Externally publishedYes

ASJC Scopus Subject Areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Keywords

  • atomic force microscopy tips
  • diamond probes
  • local anodic oxidation
  • nanolithography

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