Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics

Andrew J. Peters; Richard A. Lawson; Peter J. Ludovice; Clifford L. Henderson

doi:10.1117/12.918077

Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics

Andrew J. Peters
, Richard A. Lawson
, Peter J. Ludovice
, Clifford L. Henderson

School of Chemical and Biomolecular Engineering, Georgia Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Alternative Lithographic Technologies IV
Publisher	SPIE
ISBN (Print)	9780819489791
DOIs	https://doi.org/10.1117/12.918077
State	Published - 2012
Externally published	Yes
Event	Alternative Lithographic Technologies IV - San Jose, CA, United States Duration: Feb 13 2012 → Feb 16 2012

Publication series

Series	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8323
ISSN	0277-786X

Conference

Conference	Alternative Lithographic Technologies IV
Country/Territory	United States
City	San Jose, CA
Period	2/13/12 → 2/16/12

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

block-copolymer
modeling
molecular dynamics
PMMA
polystyrene
protracted colored noise dynamics
self-assembly
simulation

Access to Document

10.1117/12.918077

Cite this

Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. / Peters, Andrew J.; Lawson, Richard A.; Ludovice, Peter J. et al.
Alternative Lithographic Technologies IV. SPIE, 2012. 83231T (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 8323).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Peters, AJ, Lawson, RA, Ludovice, PJ & Henderson, CL 2012, Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics. in Alternative Lithographic Technologies IV., 83231T, SPIE, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8323, Alternative Lithographic Technologies IV, San Jose, CA, United States, 2/13/12. https://doi.org/10.1117/12.918077

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title = "Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics",

keywords = "block-copolymer, modeling, molecular dynamics, PMMA, polystyrene, protracted colored noise dynamics, self-assembly, simulation",

author = "Peters, \{Andrew J.\} and Lawson, \{Richard A.\} and Ludovice, \{Peter J.\} and Henderson, \{Clifford L.\}",

year = "2012",

doi = "10.1117/12.918077",

language = "English",

isbn = "9780819489791",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes

T2 - Alternative Lithographic Technologies IV

AU - Peters, Andrew J.

AU - Lawson, Richard A.

AU - Ludovice, Peter J.

AU - Henderson, Clifford L.

PY - 2012

Y1 - 2012

KW - block-copolymer

KW - modeling

KW - molecular dynamics

KW - PMMA

KW - polystyrene

KW - protracted colored noise dynamics

KW - self-assembly

KW - simulation

UR - https://www.scopus.com/pages/publications/84878420262

UR - https://www.scopus.com/pages/publications/84878420262#tab=citedBy

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M3 - Conference contribution

AN - SCOPUS:84878420262

SN - 9780819489791

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Alternative Lithographic Technologies IV

PB - SPIE

Y2 - 13 February 2012 through 16 February 2012

ER -

Detailed mesoscale dynamic simulation of block copolymer directed self-assembly processes: Application of protracted colored noise dynamics

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

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