Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns

Benjamin D. Nation; Andrew Peters; Richard A. Lawson; Peter J. Ludovice; Clifford L. Henderson

doi:10.1117/12.2085526

Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns

Benjamin D. Nation
, Andrew Peters
, Richard A. Lawson
, Peter J. Ludovice
, Clifford L. Henderson

Georgia Institute of Technology

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Proceedings of SPIE
Volume	9423
DOIs	https://doi.org/10.1117/12.2085526
State	Published - Mar 19 2015
Externally published	Yes

Disciplines

Physics
Optics

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10.1117/12.2085526License: Unspecified

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title = "Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns",

author = "Nation, \{Benjamin D.\} and Andrew Peters and Lawson, \{Richard A.\} and Ludovice, \{Peter J.\} and Henderson, \{Clifford L.\}",

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language = "American English",

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TY - JOUR

T1 - Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns

AU - Nation, Benjamin D.

AU - Peters, Andrew

AU - Lawson, Richard A.

AU - Ludovice, Peter J.

AU - Henderson, Clifford L.

N1 - SPIE Digital Library Proceedings

PY - 2015/3/19

Y1 - 2015/3/19

UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9423/1/Effect-of-chemoepitaxial-guiding-underlayer-design-on-the-pattern-quality/10.1117/12.2085526.full

U2 - 10.1117/12.2085526

DO - 10.1117/12.2085526

M3 - Article

VL - 9423

JO - Proceedings of SPIE

JF - Proceedings of SPIE

ER -

Effect of chemoepitaxial guiding underlayer design on the pattern quality and shape of aligned lamellae for fabrication of line-space patterns

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