Effect of guiding layer topography on chemoepitaxially directed self-assembly of block copolymers for pattern density multiplication

Benjamin D. Nation; Andrew Peters; Richard A. Lawson; Peter J. Ludovice; Clifford L. Henderson

doi:10.1117/12.2046629

Effect of guiding layer topography on chemoepitaxially directed self-assembly of block copolymers for pattern density multiplication

Benjamin D. Nation
, Andrew Peters
, Richard A. Lawson
, Peter J. Ludovice
, Clifford L. Henderson

Georgia Institute of Technology

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Proceedings of SPIE
Volume	9049
DOIs	https://doi.org/10.1117/12.2046629
State	Published - Mar 28 2014
Externally published	Yes

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Physics
Optics

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title = "Effect of guiding layer topography on chemoepitaxially directed self-assembly of block copolymers for pattern density multiplication",

author = "Nation, \{Benjamin D.\} and Andrew Peters and Lawson, \{Richard A.\} and Ludovice, \{Peter J.\} and Henderson, \{Clifford L.\}",

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doi = "10.1117/12.2046629",

language = "American English",

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TY - JOUR

T1 - Effect of guiding layer topography on chemoepitaxially directed self-assembly of block copolymers for pattern density multiplication

AU - Nation, Benjamin D.

AU - Peters, Andrew

AU - Lawson, Richard A.

AU - Ludovice, Peter J.

AU - Henderson, Clifford L.

N1 - SPIE Digital Library Proceedings

PY - 2014/3/28

Y1 - 2014/3/28

UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9049/1/Effect-of-guiding-layer-topography-on-chemoepitaxially-directed-self-assembly/10.1117/12.2046629.full

U2 - 10.1117/12.2046629

DO - 10.1117/12.2046629

M3 - Article

VL - 9049

JO - Proceedings of SPIE

JF - Proceedings of SPIE

ER -

Effect of guiding layer topography on chemoepitaxially directed self-assembly of block copolymers for pattern density multiplication

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