Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

J. Miller; A. Ceballos; L. B. Bayu Aji; A. Moore; C. Wasz; S. O. Kucheyev; S. Elhadj; S. Falabella

doi:10.1016/j.tsf.2020.138394

Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

J. Miller
, A. Ceballos
, L. B. Bayu Aji
, A. Moore
, C. Wasz
, S. O. Kucheyev
, S. Elhadj
, S. Falabella

Lawrence Livermore National Laboratory
United States Air Force Academy

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	138394
Journal	Thin Solid Films
Volume	714
DOIs	https://doi.org/10.1016/j.tsf.2020.138394
State	Published - Nov 30 2020
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Keywords

Amorphous hydrogenated carbon
Coatings
Diamond-like carbon
Plasma chemical vapor deposition

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10.1016/j.tsf.2020.138394

Cite this

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title = "Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films",

keywords = "Amorphous hydrogenated carbon, Coatings, Diamond-like carbon, Plasma chemical vapor deposition",

author = "J. Miller and A. Ceballos and \{Bayu Aji\}, \{L. B.\} and A. Moore and C. Wasz and Kucheyev, \{S. O.\} and S. Elhadj and S. Falabella",

note = "Publisher Copyright: {\textcopyright} 2020",

year = "2020",

month = nov,

day = "30",

doi = "10.1016/j.tsf.2020.138394",

language = "English",

volume = "714",

journal = "Thin Solid Films",

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TY - JOUR

T1 - Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

AU - Miller, J.

AU - Ceballos, A.

AU - Bayu Aji, L. B.

AU - Moore, A.

AU - Wasz, C.

AU - Kucheyev, S. O.

AU - Elhadj, S.

AU - Falabella, S.

PY - 2020/11/30

Y1 - 2020/11/30

KW - Amorphous hydrogenated carbon

KW - Coatings

KW - Diamond-like carbon

KW - Plasma chemical vapor deposition

UR - https://www.scopus.com/pages/publications/85092536337

UR - https://www.scopus.com/pages/publications/85092536337#tab=citedBy

U2 - 10.1016/j.tsf.2020.138394

DO - 10.1016/j.tsf.2020.138394

M3 - Article

AN - SCOPUS:85092536337

SN - 0040-6090

VL - 714

JO - Thin Solid Films

JF - Thin Solid Films

M1 - 138394

ER -

Hollow-cathode chemical vapor deposition of thick, low-stress diamond-like carbon films

UN SDGs

ASJC Scopus Subject Areas

Keywords

Access to Document

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