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Hybrid finite element-finite difference method for thermal analysis in x-ray lithography

  • Louisiana Tech University

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)660-676
Number of pages17
JournalInternational Journal of Numerical Methods for Heat and Fluid Flow
Volume9
Issue number6
DOIs
StatePublished - 1999
Externally publishedYes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

ASJC Scopus Subject Areas

  • Computational Mechanics
  • Aerospace Engineering
  • Engineering (miscellaneous)
  • Mechanical Engineering

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