| Original language | English |
|---|---|
| Pages (from-to) | 540-548 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4979 |
| DOIs | |
| State | Published - 2003 |
| Externally published | Yes |
| Event | Micromachining and Microfarication Process Technology VIII - San Jose, CA, United States Duration: Jan 27 2003 → Jan 29 2003 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Keywords
- Inverse model
- Laser-induced chemical vapor deposition (LCVD)
- Scanning pattern
- Three dimensional numerical simulation
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