Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise

Shawn Le; Hisham Hegab

doi:10.1016/j.sna.2017.01.016

Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise

Shawn Le
, Hisham Hegab

Louisiana Tech University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	66-76
Number of pages	11
Journal	Sensors and Actuators, A: Physical
Volume	256
DOIs	https://doi.org/10.1016/j.sna.2017.01.016
State	Published - Apr 1 2017

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being
SDG 9 Industry, Innovation, and Infrastructure

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Keywords

Gas micro compressor
Gas micropump
MEMS
Microvalve
Multistage microcompressor
Piezoelectric diaphragm

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10.1016/j.sna.2017.01.016License: Unspecified

Cite this

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title = "Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise",

keywords = "Gas micro compressor, Gas micropump, MEMS, Microvalve, Multistage microcompressor, Piezoelectric diaphragm",

author = "Shawn Le and Hisham Hegab",

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AU - Hegab, Hisham

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KW - Gas micropump

KW - MEMS

KW - Microvalve

KW - Multistage microcompressor

KW - Piezoelectric diaphragm

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M3 - Article

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JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Investigation of a multistage micro gas compressor cascaded in series for increase pressure rise

UN SDGs

ASJC Scopus Subject Areas

Keywords

Access to Document

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