Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Tianhong Cui; Y. Lvov; Feng Hua; Jingshi Shi

doi:10.1109/SENSOR.2003.1215579

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Tianhong Cui
, Y. Lvov
, Feng Hua
, Jingshi Shi

Institute for Micromanufacturing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	738-741
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1215579
State	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Publication series

Series	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	1

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	6/8/03 → 6/12/03

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Keywords

Adhesives
Biomedical optical imaging
Lithography
Nanoparticles
Optical device fabrication
Optical films
Optical sensors
Self-assembly
Silicon compounds
Transistors

Access to Document

10.1109/SENSOR.2003.1215579

Cite this

Cui, T., Lvov, Y., Hua, F., & Shi, J. (2003). Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 738-741). Article 1215579 Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215579

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems. / Cui, Tianhong; Lvov, Y.; Hua, Feng et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 738-741 1215579 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Cui, T, Lvov, Y, Hua, F & Shi, J 2003, Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1215579, Institute of Electrical and Electronics Engineers Inc., TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 1, pp. 738-741, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1215579

Cui T, Lvov Y, Hua F, Shi J. Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 738-741. 1215579. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, Vol. 1). doi: 10.1109/SENSOR.2003.1215579

Cui, Tianhong ; Lvov, Y. ; Hua, Feng et al. / Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 738-741 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, Vol. 1).

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title = "Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems",

keywords = "Adhesives, Biomedical optical imaging, Lithography, Nanoparticles, Optical device fabrication, Optical films, Optical sensors, Self-assembly, Silicon compounds, Transistors",

author = "Tianhong Cui and Y. Lvov and Feng Hua and Jingshi Shi",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

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AU - Hua, Feng

AU - Shi, Jingshi

PY - 2003

Y1 - 2003

KW - Adhesives

KW - Biomedical optical imaging

KW - Lithography

KW - Nanoparticles

KW - Optical device fabrication

KW - Optical films

KW - Optical sensors

KW - Self-assembly

KW - Silicon compounds

KW - Transistors

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Y2 - 8 June 2003 through 12 June 2003

ER -

Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

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