Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

Tianhong Cui; Feng Hua; Yuri Lvov

doi:10.1016/j.sna.2004.01.023

Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

Tianhong Cui
, Feng Hua
, Yuri Lvov

Institute for Micromanufacturing
University of Minnesota

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	501-504
Number of pages	4
Journal	Sensors and Actuators, A: Physical
Volume	114
Issue number	2-3
DOIs	https://doi.org/10.1016/j.sna.2004.01.023
State	Published - Sep 1 2004
Externally published	Yes
Event	Selected Papers from Transducers 03 - Boston, MA, United States Duration: Jun 8 2003 → Jun 12 2003

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Keywords

Lithograpgy
Microsystems
Nano self-assembly
Nanoparticle
Patterning

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10.1016/j.sna.2004.01.023

Cite this

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title = "Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems",

keywords = "Lithograpgy, Microsystems, Nano self-assembly, Nanoparticle, Patterning",

author = "Tianhong Cui and Feng Hua and Yuri Lvov",

year = "2004",

month = sep,

day = "1",

doi = "10.1016/j.sna.2004.01.023",

language = "English",

volume = "114",

pages = "501--504",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

number = "2-3",

note = "Selected Papers from Transducers 03 ; Conference date: 08-06-2003 Through 12-06-2003",

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TY - JOUR

T1 - Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

AU - Cui, Tianhong

AU - Hua, Feng

AU - Lvov, Yuri

PY - 2004/9/1

Y1 - 2004/9/1

KW - Lithograpgy

KW - Microsystems

KW - Nano self-assembly

KW - Nanoparticle

KW - Patterning

UR - https://www.scopus.com/pages/publications/4344631739

UR - https://www.scopus.com/pages/publications/4344631739#tab=citedBy

U2 - 10.1016/j.sna.2004.01.023

DO - 10.1016/j.sna.2004.01.023

M3 - Conference article

AN - SCOPUS:4344631739

SN - 0924-4247

VL - 114

SP - 501

EP - 504

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

IS - 2-3

T2 - Selected Papers from Transducers 03

Y2 - 8 June 2003 through 12 June 2003

ER -

Lithographic approach to pattern multiple nanoparticle thin films prepared by layer-by-layer self-assembly for microsystems

ASJC Scopus Subject Areas

Keywords

Access to Document

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