| Original language | English |
|---|---|
| Pages (from-to) | 220-227 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4982 |
| DOIs | |
| State | Published - 2003 |
| Externally published | Yes |
| Event | Microfluidics, BioMEMS, and Medical Microsystems - San Jose, CA, United States Duration: Jan 27 2003 → Jan 29 2003 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Keywords
- Mechanical properties
- Microcapsules
- Silicon micromachining
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