Nano self-assembly for MEMS and microelectronics applications (invited paper)

Tianhong Cui; Yuri Lvov

doi:10.1117/12.667845

Nano self-assembly for MEMS and microelectronics applications (invited paper)

Tianhong Cui
, Yuri Lvov

University of Minnesota Twin Cities
Institute for Micromanufacturing

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Article number	603202
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6032
DOIs	https://doi.org/10.1117/12.667845
State	Published - 2006
Externally published	Yes
Event	ICO20: MEMS, MOEMS, and NEMS - Changchun, China Duration: Aug 21 2005 → Aug 26 2005

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

MEMS
Microelectronics
Nano Self-Assembly

Access to Document

10.1117/12.667845

Cite this

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title = "Nano self-assembly for MEMS and microelectronics applications (invited paper)",

keywords = "MEMS, Microelectronics, Nano Self-Assembly",

author = "Tianhong Cui and Yuri Lvov",

year = "2006",

doi = "10.1117/12.667845",

language = "English",

volume = "6032",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "ICO20: MEMS, MOEMS, and NEMS ; Conference date: 21-08-2005 Through 26-08-2005",

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TY - JOUR

T1 - Nano self-assembly for MEMS and microelectronics applications (invited paper)

AU - Cui, Tianhong

AU - Lvov, Yuri

PY - 2006

Y1 - 2006

KW - MEMS

KW - Microelectronics

KW - Nano Self-Assembly

UR - https://www.scopus.com/pages/publications/33645153297

UR - https://www.scopus.com/pages/publications/33645153297#tab=citedBy

U2 - 10.1117/12.667845

DO - 10.1117/12.667845

M3 - Conference article

AN - SCOPUS:33645153297

SN - 0277-786X

VL - 6032

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 603202

T2 - ICO20: MEMS, MOEMS, and NEMS

Y2 - 21 August 2005 through 26 August 2005

ER -

Nano self-assembly for MEMS and microelectronics applications (invited paper)

UN SDGs

ASJC Scopus Subject Areas

Keywords

Access to Document

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