Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers

Benjamin D. Nation; Andrew Peters; Richard A. Lawson; Peter J. Ludovice; Clifford L. Henderson

doi:10.1117/12.2046626

Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers

Benjamin D. Nation
, Andrew Peters
, Richard A. Lawson
, Peter J. Ludovice
, Clifford L. Henderson

Georgia Institute of Technology

Research output: Contribution to journal › Article › peer-review

Original language	American English
Journal	Proceedings of SPIE
Volume	9049
DOIs	https://doi.org/10.1117/12.2046626
State	Published - Mar 28 2014
Externally published	Yes

Disciplines

Physics
Optics

Access to Document

10.1117/12.2046626License: Unspecified

Cite this

@article{2c70514c588b424ca164e2b7ccf2cf24,

title = "Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers",

author = "Nation, \{Benjamin D.\} and Andrew Peters and Lawson, \{Richard A.\} and Ludovice, \{Peter J.\} and Henderson, \{Clifford L.\}",

note = "SPIE Digital Library Proceedings",

year = "2014",

month = mar,

day = "28",

doi = "10.1117/12.2046626",

language = "American English",

volume = "9049",

journal = "Proceedings of SPIE",

}

TY - JOUR

T1 - Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers

AU - Nation, Benjamin D.

AU - Peters, Andrew

AU - Lawson, Richard A.

AU - Ludovice, Peter J.

AU - Henderson, Clifford L.

N1 - SPIE Digital Library Proceedings

PY - 2014/3/28

Y1 - 2014/3/28

UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9049/1/Predicting-process-windows-for-pattern-density-multiplication-using-block-copolymer/10.1117/12.2046626.full

U2 - 10.1117/12.2046626

DO - 10.1117/12.2046626

M3 - Article

VL - 9049

JO - Proceedings of SPIE

JF - Proceedings of SPIE

ER -

Predicting process windows for pattern density multiplication using block copolymer directed self-assembly in conjunction with chemoepitaxial guiding layers

Disciplines

Access to Document

Other files and links

Fingerprint

Cite this