Three-dimensional numerical model for thermal analysis in x-ray irradiated photoresists with cylindrical domain

W. Dai; R. Nassar

doi:10.1080/10407789708913904

Three-dimensional numerical model for thermal analysis in x-ray irradiated photoresists with cylindrical domain

W. Dai
, R. Nassar

Louisiana Tech University

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	517-530
Number of pages	14
Journal	Numerical Heat Transfer; Part A: Applications
Volume	32
Issue number	5
DOIs	https://doi.org/10.1080/10407789708913904
State	Published - Oct 1997
Externally published	Yes

ASJC Scopus Subject Areas

Numerical Analysis
Condensed Matter Physics

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title = "Three-dimensional numerical model for thermal analysis in x-ray irradiated photoresists with cylindrical domain",

author = "W. Dai and R. Nassar",

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AU - Nassar, R.

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IS - 5

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Three-dimensional numerical model for thermal analysis in x-ray irradiated photoresists with cylindrical domain

ASJC Scopus Subject Areas

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