@article{70e92e92329340f5830df1ad9e370204,
title = "Transient three-dimensional numerical model for thermal analysis in x-ray lithography",
author = "H. Hegab and B. Shen and W. Dai and T. Ameel and Hisham Hegab",
note = "ADS Classic is now deprecated. It will be completely retired in October 2019. Please redirect your searches to the new ADS modern form or the classic form. More info can be found on our blog. Not Available",
year = "1998",
month = dec,
doi = "10.1080/10407789808914017",
language = "English",
volume = "34",
pages = "805--819",
journal = "Numerical Heat Transfer; Part A: Applications",
issn = "1040-7782",
number = "8",
}